ADVANCED PROCESSES FOR LOW-TEMPERATURE FORMATION OF FUNCTIONAL METAL OXIDE BASED THIN FILMS ArticleAbduev A., Akhmedov A., Asvarov A., Kanevsky V., Muslimov A., Belyaev V., Generalov D., Nikolaeva D., Tirado J., Frah M.A.A.Journal of Physics: Conference Series. Том 2056. 2021.
