Characterization of CNx films by X-ray emission measurements

Авторы
Kurmaev E.Z. 1 , Shamin S.N. 1 , Moewes A. 2, 6 , Winarski R.P. 3 , Ederer D.L. 3 , Feng J.Y. 4 , Turner S.S. 5
Journal
Thin Solid Films
Номер выпуска
1-2
Язык
English
Страницы
60-64
Статус
Published
Том
402
Год
2002
Организации
  • 1 Institute of Metal Physics|Russian Academy of Sciences-Ural Division
  • 2 University of Sashatchewan|Departments of Physics and Engineering Physics
  • 3 Department of Physics and Engineering Physics|University of Saskatchewan
  • 4 Department of Physics|Tulane University
  • 5 Department of Materials Science and Engineering|Tsinghua University
  • 6 Royal Institution of Great Britain
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