The electrical properties of individual ZnO nanorods were investigated. Chemical vapor deposition was used to grow arrays of ordered ZnO nanorods on silicon substrates. A 3D manipulation system was used to separate individual nanorods. Then, these were transferred to interdigital platinum electrodes and welded together by means of an ion beam. The ohmic nature of the contact between platinum and zinc oxide was confirmed by electrical measurements. The high quality of the material was confirmed by studying the cathodoluminescence spectrum of these nanorods. A possibility of the diffusion length estimation in nanorods with ohmic contacts from the electron beam induced current measurements is demonstrated. It is shown that in ZnO nanorods grown by chemical vapor deposition, the diffusion length can reach values up to 2 μ m. This value is a few times higher than the data available in the literature that confirm the low defect content in such nanorods. © 2025 Elsevier B.V., All rights reserved.