Исследование оптоэлектронного датчика угловых смещений на основе глубокой отражательной фазовой дифракционной решётки

Предложен и исследован оптоэлектронный датчик малых угловых перемещений на основе дифракции лазерного пучка на глубокой отражательной фазовой дифракционной решётке. Проведён теоретический анализ и экспериментальные исследования характеристик датчика.

Investigations of an Optoelectronic Device for Angular Displacements Measurements with Use of a Deep Phasetype Reflective Grating

An optoelectronic device for measurements of small angular displacements based on a diffraction of a laser beam on a deep reflective phasetype grating was suggested and investigated. The grating's depth is about several wavelengths. The zero diffraction order's power dependency on the incident angle of a laser beam was investigated theoretically and experimentally. There were found conditions when linear conversion of angular vibrations into changes of power of zero order took place. The experimentally measured sensitivity of the device was rad with channel bandwidth of 800 Hz and signal-to-noise ratio 10.