Investigation of the Intercalation and Deintercalation of Lithium Ions in a Thin-Film Lithium-Ion Battery by Rutherford Backscattering Spectrometry

The paper presents the results of a study on the distribution of lithium in a solid-state thin-film lithium-ion battery using the Rutherford backscattering spectrometry (RBS) method. The analysis employs He⁺ ions with an energy of 1.8 MeV, scattered at an angle of 165° with normal incidence to the surface. Based on the energy loss of scattered ions, we determine the concentration of Li ions in the battery layers in both charged and discharged states. The study shows that the Li-concentration values obtained through the RBS method and the galvanostatic-measurement method coincide, provided that the specific stopping cross section for lithium ε_Li in the anode layer is half of that in the single-element substance.