ADVANCED PROCESSES FOR LOW-TEMPERATURE FORMATION OF FUNCTIONAL METAL OXIDE BASED THIN FILMS СтатьяAbduev A., Akhmedov A., Asvarov A., Kanevsky V., Muslimov A., Belyaev V., Generalov D., Nikolaeva D., Tirado J., Frah M.A.A.Journal of Physics: Conference Series. Том 2056. 2021.
