A COMPREHENSIVE STUDY OF NONUNIFORMITY PROPERTIES OF THE LICOO<SUB>2</SUB> THIN-FILM CATHODE FABRICATED BY RF SPUTTERING СтатьяKurbatov S.V., Rudy A.S., Naumov V.V., Mironenko A.A., Savenko O.V., Smirnova M.A., Mazaletsky L.A., Pukhov D.E.Russian Microelectronics. Том 53. 2024. С. 202-216